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Flow stresses in thin metal films significantly exceed the flow stresses of their bulk counterparts. In order to identify the underlying deformation mechanisms and correlate them with microstructure, we analysed epitaxial and polycrystalline Cu and Al thin films. The films (100-2000 nm thickness) were magnetron sputtered on (0001) α-Al 2 O 3 single crystals or on nitrided and oxidised...
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