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SU‐8‐based photonic‐microfluidic integrated devices with on‐chip beam shaping and collection capabilities were demonstrated in a scattering detection and counting application. Through the proper deployment of the tailored beam geometries via the on‐chip excitation optics, excellent CV values were measured for 1, 2, and 5 μm blank beads, 16.4, 11.0, and 12.5%, respectively, coupled with a simple free‐space...
A photonic‐microfluidic integrated device is demonstrated with excellent and reliable fluorescence detection performance. CV values of 8% for 2.5‐μm beads and 14% for 6‐μm beads were achieved through the correct deployment of carefully formed excitation beam shapes via integrated on‐chip optics even without the use of 3D hydrodynamic focusing or a high‐quality laser source and single mode beam propagation...
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