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In this paper, diamond-like carbon (DLC) coatings with AlCrSi co-doping were deposited by a reactive high power impulse magnetron sputtering (HiPIMS) with utilizing a gas mixture of Ar and C2H2 as the precursor. The doping contents of Al, Cr and Si in the coatings were controlled by adjusting the C2H2 flow fraction in the gas mixture. The influences of the HiPIMS frequency and C2H2 flow on the microstructure,...
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