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In order to utilize silicon wafer as electrode and substrate for integrated lithium-ion batteries, a composite film with in-situ formed porosity (lithium phosphorous oxynitride/tin oxide, LiPON/SnO2) is fabricated and directly exploited as the artificial solid electrolyte interphase film. Without the compromise of Coulombic efficiency, the capacity and cycle performance of silicon wafer are both developed,...
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