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Microlens-integrated bottom-emitting 980-nm vertical-cavity surface-emitting lasers (VCSELs) with an emitting window aperture of 400 mum have been fabricated. A novel material structure with nine InGaAs-GaAsP quantum wells and slightly decreased reflectivity of n-type distributed Bragg reflectors (n-DBRs) are employed to increase the output power. A convex microlens is fabricated by a one-step diffusion-limited...
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