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Electrode-to-resonator gaps as small as 13.2nm achieved on a 59.5-MHz capacitive-gap transduced disk resonator have now enabled a measured electromechanical coupling strength (Cx/Co) greater than 1.62% at a bias voltage of only 5.5V while retaining an unloaded Q of 29,640, for a kt2Q product of 480 that sets the record at VHF. Several key discoveries contribute to this successful demonstration, including...
An electromechanical circuit constructed from array-composites of capacitive-gap micromechanical resonators with differing frequencies, wired in closed-loop feedback with a single ASIC amplifier, provides a first MEMS-based multi-frequency oscillator generating simultaneous oscillation outputs in the vicinity of 61 MHz. The use of only one amplifier for all frequencies (as opposed to one for each...
A voltage controlled electrical stiffness tuning method has been demonstrated to correct phase and amplitude mismatches between the constituent resonators in a half-wavelength (λ/2) mechanically coupled array-composite towards maximizing its output power. Via tuning, a nine-disk array-composite using 3 output resonators achieves an output current 2.91× larger than that of a single one of its constituent...
MOS transistors are investigated by low frequency noise measurements before and after Fowler-Nordheim (F-N) injection. The comparison with other techniques such as static I(V) characterisation and charge pumping method is also done in order to correlate the noise level to the MOSFET interface properties. The results are discussed in term of number and mobility fluctuations noise model.
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