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The use of active feedback in closed-loop with two electrodes of a four-electrode capacitive-gap transduced wineglass disk resonator has enabled boosting of the effective resonator Q and independent control of insertion loss across the two other electrodes. To demonstrate the utility of this approach, two such Q-boosted resonators wired as a parallel-type micro-mechanical filter achieve a tiny 0.001%...
A 61-MHz Pierce oscillator referenced to a single polysilicon surface-micromachined wine-glass disk resonator has achieved phase noise marks of −119dBc/Hz at a 1-kHz offset and −139dBc/Hz at far-from-carrier offsets. When divided down to GSM's 13MHz, this corresponds to −132dBc/Hz at 1-kHz and −152dBc/Hz at far-from-carrier offsets, both of which satisfy GSM reference oscillator phase noise requirements...
A low phase noise oscillator referenced to a 61-MHz vibrating wine-glass disk resonator with anchor-isolating supports designed to suppress microphonics has posted (without any compensation) a measured acceleration sensitivity at least as good as Γ ∼0.2ppb/g for vibration frequencies up to 2kHz and in all directions, yielding a vector magnitude Γ less than 0.5ppb/g. Remarkably, this result is at least...
A capacitive-gap transduced micromechanical ring resonator based on a radial contour vibration mode and constructed from hot filament CVD boron-doped microcrystalline diamond has achieved a Q of 42,900 at 2.9685GHz that represents the highest series-resonant Q yet measured at this frequency for any on-chip room temperature resonator, as well as the highest f·Q of 1.27×1014 for acoustic resonators,...
A micromechanical displacement amplifier comprising two asymmetric resonator array composites coupled by a quarter-wavelength beam has been demonstrated that permits specification of gain factor by mere (digital) selection of an appropriate ratio of the number of resonators in an input array to that in an output array. Like the method, this displacement gain circuit is a key enabler for resoswitch-based...
A statistical comparison between the resonance frequency variations of stand-alone micromechanical disk resonators and mechanically-coupled array composites of them reveals that mechanically-coupled arraying of on-chip micromechanical resonators can very effectively enhance the manufacturing repeatability of resonance frequencies. In particular, twenty 3-disk resonator array-composites on a single...
The resonance and nonlinear dynamical properties of micromechanical structures have been harnessed to demonstrate an impacting micromechanical switch with substantially higher switching speed, better reliability (even under hot switching), and lower actuation voltage, all by substantial factors, over conventional RF MEMS switches. The particular resoswitch implementation demonstrated in this work...
A micromechanical vibrating spoke-supported ring resonator fabricated in a low deposition temperature nickel metal material has been demonstrated in two vibration modes spanning frequencies from HF (18 MHz) to UHF (425.7 MHz) with Q's as high as 6,405 and 2,467, respectively. The use of an anchor isolating spoke-supported ring geometry along with notched support attachments between the ring structure...
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