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The third-order intermodulation distortion in properly terminated high-order bridged clamped-clamped beam (CC-beam) channel-select micromechanical filters has been measured for the first time and found to be appreciably higher than seen on unterminated stand-alone CC-beams. In particular, a three-resonator bridged 8-MHz filter with 140nm gaps posts a measured IIP3 of 25dBm and 36dBm for two-tone offsets...
The introduction of a 39nm-gap capacitive transducer, voltage-controlled frequency tuning, and a stress relieving coupled array design has enabled a 0.09% bandwidth 223.4-MHz channel-select filter with only 2.7dB of in-band insertion loss and 50dB of out-of-channel interferer rejection. This amount of rejection is more than 23dB better than a previous capacitive-gap transduced filter design that did...
A 215-MHz polysilicon capacitive-gap transduced micromechanical resonator array employing 50 mechanically coupled radial-contour mode disks — the largest such array yet fabricated and measured — has achieved 3.5× better frequency stability than single stand-alone disks against fluctuations in the dc bias voltage (VP) normally applied across electrode-to-resonator gaps during device operation. The...
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