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Modifying the lead zirconate titanate thick films by Nb5+ can thoroughly optimize the properties of the thick films in micro-electromechanical systems, sensors, and microactuators. In this article, the Nb5+ is doped in sol–gel synthesized thick films of PZT with the thickness of more than 27 µm. In order to produce the thick films, a new modified sol–gel method based on the niobium chloride precursor...
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