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This paper, for the first time, presents the accurate results of coupled fabrication process simulation and mechanical performance analysis of microstructures using cellular automata (CA) method. According to the process sequences and process parameters, the microstructures are accurately generated using the CA method. The mechanical performance of the microstructures obtained is then analyzed using...
Mechanisms during plasma etching process in micro-electro-mechanical systems (MEMS) and integrated circuits (IC) fabrication have been analyzed. The plasma etching process has then been successfully simulated based on the plasma etching models and the cellular automata (CA) method for boundary movement simulation. Simulation results show an agreement with the available experimental results. This is...
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