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We have studied the structure of a high-porous silica thin film with pore sizes in nanometer scale using X-ray reflectivity and small angle X-ray scattering in grazing incidence geometry. The reflectivity data provide the information of surface and interface characteristics, density–depth profile, and porosity of the xerogel film. Whereas the grazing incidence small angle X-ray scattering results...
In this work, we have investigated the thermal stability of the organic component of porous SiO 2 (xerogel) films using a combination of ion beam techniques and thermal desorption spectroscopy (TDS). Ion beam techniques reveal a large concentration of carbon and hydrogen atoms in this film. The presence of these elements arises from the surface modification step in xerogel film processing,...
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