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Semiconductor microlens arrays with circular, cylindrical, square, and ring-type bases were fabricated by using selective oxidation of chirped short-period superlattice of GaAs-AlGaAs. Confocal microscopy and atomic force microscopy were used to evaluate the surface morphology of the fabricated microlenses, which revealed that they have cross-sectional profiles close to spherical in shape and an root-mean-square...
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