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A MEMS (Micro-electro-mechanical systems) fluid viscosity sensor with resonant trapezoidal micro cantilever is introduced in this paper. The fluid viscosity can be measured through the relationship between the fluid viscosity and the quality factor, the resonant frequency of the micro cantilever immersed in the fluid. In order to improve the sensitivity of the viscosity sensor, the geometry of the...
The working principle and fabrication process of MEMS density sensor have been studied in this paper. And the density experiments were performed in acetone and silicon oil at temperatures in the range from 20.0 to 50.0 °C under atmospheric pressure. The maximum deviation and the average absolute deviation between the density experimental results and the reference values are −0.72% and 0.32%, respectively...
A rectangle cantilever-type micro density sensor was researched based on MEMS (Micro Electro-mechanical System) technology. A Ti-Pt-Au coil and a Wheatstone full bridge were made on the top of the rectangle cantilever-type sensitive chip. The sensitive chip was placed in uniform strong magnetic field. The resonant frequency of the sensitive chip was changed with the change of the AC current's frequency...
A MEMS (Micro Electro-mechanical System) resonator-type viscosity sensor with range from 0 to 1 mPa·s was presented with good frequency response and high sensitivity. Its sensitive chip with a triangular cantilever structure was investigated. This paper studied the operating principle of the MEMS resonator-type viscosity sensor. The natural frequency of the sensitive chip was deduced with its structure...
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