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We present a simple and facile method for producing high-performance hydrogen (H2) sensors based on vertically ordered metal-oxide nanorods with a Pd films on a 4-inch SiO2/Si substrate by a glancing-angle deposition. Firstly, optimal density of nanorods was formed by changing an incident angle of vapor flux. Secondly, nanogaps between each nanorod were precisely controlled by manipulating thickness...
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