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In this study, we developed a microbolometer chip fabricated from high temperature superconducting Bi2Sr2CaCu2O8+δ (Bi2212) single crystals for the terahertz (THz) detection. For the manufacturing of the microbolometer chips, Bi2212 single crystals were transferred on substrate in the thin film like form and electron beam lithography, ion beam etching techniques were used. Resistance versus temperature...
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