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On-chip integrated solenoid inductors with multilayered nanogranular magnetic cores have been designed and fabricated on silicon wafers. Both decoupled and coupled inductors with multilayered magnetic cores were studied. For the decoupled inductor, an inductance of 14.2nH or an equivalent inductance area density greater than 100nH/mm2 was obtained, which is about 14 times of that of the air-core inductor,...
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