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This paper presents an effective method to achieve synchronized laser scanning of multiple beams by using MEMS diffraction gratings with their resonant frequency fine tuning mechanisms. Multiple gratings are actuated in-plane by a common electrostatic comb-driven resonator and their resonant frequencies can be fine-tuned to compensate the micromachining process errors. Continuous and reversible resonant...
MEMS optical scanners are highly desired due to their low-power, high-speed scanning. The in-plane vibratory grating scanner is a development in this area which possesses several unique features. The in-plane scanning minimizes the dynamic deformation, allowing for higher-resolution displays. The dispersive element permits splitting the incoming beam into its constituents for analysis and imaging...
A novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7deg and scanning frequency of 20.35 kHz are experimentally achieved.
This paper demonstrates the realization of a novel lamellar grating out-of-plane gyroscope design. The sensing mechanism is based on out-of-plane motion of movable light-reflecting beams changing the phase relationship between the light reflected off the two sets of beams. This phase relationship is manifested as an intensity change in the zeroth-order diffracted light. The device consists of two...
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