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Micro-arc ignition on the oily surface is investigated in a capacitively-coupled plasma (CCP) system. In this system, micro-arc generation is enhanced by increased level of plasma potential, which is induced by a DC-grounded coil between blocking capacitor and the powered electrode. The images of micro-arcs are captured with very short exposure time of 20 μs using intensified charge-coupled device...
In capacitively coupled plasma, the driving frequency is changed to modify the ion bombardment energy and electron density. The multi-hole electrode capacitively coupled plasma is discharged with various driving frequencies of 13.56MHz, 27.12MHz, and 40.68MHz, in order to elucidate the frequency effects of the discharge. The change of the driving frequency modifies the plasma parameters and the length...
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