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A photonic crystal pattern fabricated into ion-implanted VCSELs can engineer the spatial overlap between the optical mode and gain cross section for improved high speed operation and reduced relative intensity noise. The ion-implanted aperture should be no more than 3 mum larger than the optical aperture in order to avoid excessive electrical parasitics. 12.5 Gb/s large signal modulation of a single...
High-speed implant-confined photonic crystal vertical-cavity surface-emitting laser (VCSEL) diodes are fabricated and characterized. The maximum achievable 3-dB bandwidth is a function of both the index confinement provided by the etched pattern (which serves to reduce the diffraction loss and provide for stabilized fundamental mode operation) and the increased parasitic resistance caused by the removal...
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