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The present paper deals with the effect of folded beam and spring support incorporated to the proof mass on comb displacement and sensitivity. The study is made for folded beam and spring type support. All the experiments are carried out on COMSOL Multiphysics 4.3 simulation tool.
The present papers deals with the designing of MEMS gyroscope for high driving resonance frequency and to study the effects of various structural parameters on the device performance. The design is based on comb capacitor configuration, which is excited by electrostatic force, sensing is based on transverse axis movement and is designed with 2μm thick polycrystalline silicon layer. The device is modeled...
We have modeled surface impedance of YBa2Cu3O7−δ thin films, using an exponential dependence on an applied rf magnetic field. For verification of the model we compared simulation results with experimental data of Nguyen et al. [2] and of Hein [14] at differing temperatures, frequencies and rf power levels. Obtained temperature dependence of the model fitting coefficients exhibited the same character...
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