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A sensor system combining a novel pressure stable thermoelectric flow and impedimetric sensor for monitoring chemical conversion in micro fluidic channels was developed. Devices were optimized for hydraulic diameters ~1 mm and overpressure regime. Impedimetric sensors consist of a pair of interdigital electrodes deposited on a silicon substrate. Thermoelectric flow sensors consist of a perforated...
In this contribution results of the non-steady state operation of a novel pressure stable thermoelectric flow sensor chip for the inline chemical process analysis in micro reactors are presented. The sensor chip consists of a heater in between two thermopiles on a novel perforated membrane, thus liquid flows on both sides. Compared to the conventional constant overtemperature/current operation the...
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