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In recent years Solid Source Doping (SSD) has been considered as a viable option in fabricating advanced CMOS devices [1], especially for forming shallow and highly doped junctions for source drain extensions (SDE) while minimizing the damage to the devices [2]. Current scaled devices require diffusion control in the nanometer range in order to form shallow SDEs using SSD. Additionally, high doping...
This paper describes the development of a quantum waveform synthesizer operating at a sampling frequency of 100 kHz with the aim of generating sine waves directly traceable to the Josesphson quantum voltage standard. The quantum reference is based on arrays of 65 536 Josephson junctions, fabricated using Nb/TiN/Nb technology and operating at a bias frequency of 16 GHz corresponding to an output voltage...
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