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The concept of column-less SEM using field emitter with a multi-stacked electrostatic lens (multi-gate FE) is proposed. To realize the column-less SEM, we revised fabrication process of the multi-gate FE.
Silicon electron field emitters may be attractive for numerous applications, mostly due to their compatibility with the dominating Si-based solid state microand nanoelectronics. The technology of nanostructure formation through a laser radiation (LR) on Si surface for the electron field emitter is proposed. N-type Si wafers are used in the experiments. The experiments were performed in an ambient...
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