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This paper proposes a new structure to reduce the transverse SAW leakage for the SAW resonator on a 42° YX-LiTaO3 substrate. The leakage occurs from the inter-digital region toward the bus-bur region in the SAW resonators. The new structure has the Ta2O5 film on the outside of the inter-digital region. In this structure, the SAW velocity in the bus-bur region becomes slower than the velocity in the...
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