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We present microsphere photolithography in combination with wet chemical etching as a fast and low-cost method to produce regular hole arrays in a (100) GaAs surface, which are suitable for controlled nucleation of self-organized InP islands in a metal–organic vapor-phase epitaxy (MOVPE) system. A hexagonal close-packed monolayer of microspheres is used as an array of microlenses to focus UV-light...
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