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We describe our recent progress in Si photonic integration technology focusing on the monolithic integration of a germanium photodetector and a silicon-wire-waveguide variable optical attenuator.
Nonlinear optical phenomena are remarkably enhanced in silicon photonic wire waveguides with ultra-small cores. Efficient nonlinear functions, such as a wavelength conversion and high-purity entangled photon pair generation, are demonstrated.
We report the fabrication of spot-size converters to efficiently connect a rib-type silicon wire waveguide with an optical fiber. The spot-size converter consists of a channel-type Si inverse taper core without a slab section and a SiOx waveguide that covers the taper. To make the Si taper core, we eliminate the Si slab at the end of the rib waveguide using a two-step etching process. The coupling...
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