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This paper describes full-wave analysis of piezoelectric boundary acoustic waves (PBAWs) propagating along a metallic grating sandwiched between 2 semi-infinite layers. In the analysis, the finite element method (FEM) is used for the grating region while the spectral domain analysis (SDA) is applied for an isotropic overlay region as well as a piezoelectric substrate region. The combination of the...
This paper describes full-wave analysis of the SiO2 overlay with finite thickness/metal grating/rotated YX-LN substrate structure. The influence of thickness and surface topology of the SiO2 overlay, metal grating selection (copper or aluminum) upon excitation and propagation characteristics of acoustic guided modes are discussed in detail. It is shown that in the structure there propagate several...
This paper reviews physical properties of piezoelectric boundary acoustic waves (PBAWs) and their application to miniature and high performance RF filters. First, basic properties of PBAWs are discussed. It is shown that PBAWs are supported in various structures provided that highly piezoelectric material(s) are employed as structural member(s). For example, PBAWs are trapped near the electrode region...
This paper describes full-wave analysis of piezoelectric boundary acoustic waves (PBAWs) propagating along a metallic grating sandwiched in between two semi-infinite layers. In the analysis, the finite element method (FEM) is used for the grating region while the spectral domain analysis (SDA) is applied for an isotropic overlay region as well as a piezoelectric substrate region. Combination of the...
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