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New fitting analyses for peak shapes in a 2D reciprocal‐space map are demonstrated to evaluate the strain, strain distribution and domain size of a crystalline ultra‐thin (15 Å) film of β‐FeSi2(100) grown epitaxially on an Si(001) substrate, using grazing‐incidence X‐ray diffraction. A 2D Laue‐fit analysis taking into account instrument broadening and the double‐domain effect provides residual maps...
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