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This paper reports on the successful implementation of a wafer-level vacuum-packaged, CMOS-compatible aluminum nitride (AlN) based microelectromechanical system (MEMS) energy harvester (EH). The reported EH features high Q-factor (709.3) and high-g survivability (harmonic at 20g), achieved through wafer-level vacuum-package scheme which reduces the air damping effect and increases the Q-factor, overcoming...
This paper experimentally demonstrates an aluminum nitride (AlN) based piezoelectric MEMS energy harvester (EH) with an operation bandwidth of 64.6Hz (859.9Hz–924.5Hz, 7.24%), peak output open-circuit voltage of 4.43V, and an output power of 82.24μW that yields a high power density of 0.734mW/cm3 with its size of 0.8×0.8×0.175cm3. The in-house microfabricated wideband EH is packaged using a novel...
In this letter, we report a miniaturization strategy for harvesting a low-frequency random vibration energy with a piezoelectric energy harvesting (EH) system utilizing coupled Helmholtz resonance and vortex shedding effect. This is made possible by transferring the low-frequency vibration energy into a pressurized fluid, which is in turn converted into predefined, pressure-independent high-frequency...
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