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In this paper, we report a design, modeling and fabrication of a microelectromechanical system (MEMS) based in-plane vibratory sub-wavelength diffraction grating scanner for high optical efficiency, high speed laser scanning applications. This paper demonstrates that with careful design, optical efficiency of more than 75% is experimentally achievable with a simple gold-coated binary sub-wavelength...
A novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7deg and scanning frequency of 20.35 kHz are experimentally achieved.
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