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This paper describes evaluation of stiffnesses of SiO2 thin films when the anisotropy in elasticity is taken into account. The authors measured the propagation direction θ dependence of the water-loaded surface acoustic waves (SAW) velocity, and tried to estimate stiffnesses of SiO2 films from the measured θ dependence. The result indicates that SiO2 films possess the strong 6mm anisotropy. Namely,...
This paper describes characterization of elastic properties of SiO2 films by the Line-Focus-Beam (LFB) ultrasonic microscopy. SiO2 films with 1 µm thickness were deposited on Si (001) substrates by sputtering or CVD with two different deposition conditions each, and the water-loaded SAW velocity on these samples was measured. Large variation of elastic properties was clearly observed among four specimens...
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