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We present a high-accuracy micromechanical digital-to-analog (DA) actuator using parallel interconnection of identical springs. The parallel DA actuator achieves a high-accuracy cascaded actuation because it is independent of spring variation caused by fabrication error. We design the parallel DA actuator using 4-bit digital actuators, whose four different unit displacement of x1=7.0 mum, x2=5.8 mum,...
We present a high-precision digital-to-analog (DA) variable capacitor, inspired from the structure and principle of biological muscle actuators. The present DA variable capacitor composed of parallel-interconnected digital actuators performs high-precision capacitance adjustment, while achieving high Q due to low-loss interconnection structure. We design, fabricate, and characterize the DA variable...
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