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A-plane (1210) AlN films were deposited on the off-angle R-plane (1102) sapphire substrates, in which the surface plane was tilted towards the [1101] sapphire direction, by metalorganic chemical vapor deposition in order to clarify off-angle effects. The polar direction of the AlN film was inverted by changing the sign of the off-angle and the off-angle was effective in restraining the generation...
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