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The MgxZn1-xO thin films for x varying from 0 to 0.36 were deposited by RF magnetron sputtering. The MgxZn1_xO films are characterized by X-ray diffraction and UV-visible spectroscopy. The MgxZn1-xO metal-semiconductor-metal ultraviolet photocodetectors (MSM-UPDs) were fabricated. We also investigated the electrical and optical properties of the MSM-UPDs.
In this study, indium tin oxide (ITO) films were fabricated by r.f. reactive sputtering on glass substrates at room temperature. After the deposition process, the films were treated by oxygen and (30% H 2 +70% N 2 ) gas mixture plasma, respectively. The effect of the plasma treatments on the electrical and optical properties of ITO films was then investigated. It was found that such...
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