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In this paper, a MEMS tilt sensor with high sensitivity maintained in the full range is designed and evaluated by open-loop measurement. The sensor contains a hexagon proof mass, micro-lever force amplifiers and three double-ended tuning fork (DETF) resonant strain gauges, converting variations of gravity to resonant frequency shift. The structure of the sensor is analyzed using finite element simulation,...
By using finite element simulation software of Patran and MD. Nastran we simulate the mechanical property of optics cabin of missile. The element analysis includes static mechanical and thermal analysis of cabin wall which can simulate the condition as missile flying, modal analysis and overloading analysis for optics system support which reflect the dynamics capability, we obtain distribution of...
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