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A highly sensitive 120 GHz integrated dielectric sensor in SiGe BiCMOS with back-side etching is presented. The sensor consists of a bandpass filter using a planar resonator, a 120 GHz VCO at the input, and a power detector at the output. The sensitivity of the stand-alone resonator and the sensor was tested by measuring the change in the detector output voltage and the shift in the frequency response...
A novel mm-wave MEMS phase shifter based on a slow wave structure is introduced. The phase shifter uses co-planer wave guide that has the signal line loaded with inductors through capacitive coupling. The inductor and the capacitive coupling capacitor are designed to work for the mm-wave frequency range. Integrated metal to metal RF MEMS switches are designed such that inductors can be shortened to...
A novel mm-wave MEMS phase shifter based on a slow wave structure is introduced. The phase shifter uses co-planer wave guide that has the signal line loaded with inductors through capacitive coupling. The inductor and the capacitive coupling capacitor are designed to work for the mm-wave frequency range. Integrated metal to metal RF MEMS switches are designed such that inductors can be shortened to...
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