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We have proposed to place an RF circuit and an antenna on each side of a silicon chip in the 60 GHz band, respectively, and to connect between them with low loss by a coaxial-line structure using a hole opening in the chip. In this paper, we fabricate a 2×2 circularly polarized patch array in an area of 5 mm square on a silicon chip and have coaxial-line connection with a separated quadrature oscillator...
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