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This paper proposes a novel quartz micromachined gyroscope. The structure is designed by using shear stress detection method which can simplify the sidewall electrodes obviously. Furthermore, a tuning fork is introduced by the structure to obtain better differential vibrations. In order to increase the sensitivity of the sensor, the sense beam is designed to be a symmetric tapered beam. The device...
This paper presents a demonstration of a novel quartz gyroscope. The sensor has a simple structure in XY plane. Compared with conventional quartz gyroscopes' two parallel independent electrodes on each sidewall, this sensor's electrodes are easy to form and the structure can be miniaturized easily. The structure is etched from a z-cut wafer. The drive mode frequency is about 5.6 kHz, and the quality...
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