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A tunable grating is fabricated by micromachining a GaN crystal layer grown on Si substrate. The tunable grating consists of grating lines, electro-static comb-drive actuator and connection springs. The grating consists of 85nm wide, 12μm long 24 grating lines with 674nm period. The crystallization stress of an HfO2 layer deposited on the GaN crystal is used to compensate the residual stress of the...
We present design, fabrication and characteristics of two-dimensional micro-machined scanner. The resonant frequencies of horizontal and vertical axes are 40 kHz and 162 Hz for the inner mirror and gimbal frame, respectively. The optical scanning angles are obtained to be 11.5 and 14 degrees at the low driving voltages of 12 and 10 V in 1 Pa vacuum for the horizontal inner mirror and vertical gimbal...
Optical characteristics of silicon nanowire waveguide connections are studied both theoretically and experimentally. Effects of geometrical sizes and positional alignments on optical performance are investigated. Results show that waveguide connections with tips wider than 500 nm and tip angles greater than critical angle enable high transmittance and less sensitivity to positional misalignments....
A varifocal micromirror is designed and fabricated using silicon micromachining technology. A spherical convex surface of mirror is generated by applying a bending moment to the circumference of micromirror. This method is different from the conventional technique in which a distributed force is exerted on the central area of mirror. On the basis of the theory of materials strength, the deformation...
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