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We report a large-amplitude resonant varifocal mirror with an acoustic cavity under atmospheric pressure. The amplitude of resonant varifocal mirror with acoustic cavity was measured by changing the cavity length. The amplitude of varifocal mirror was changed periodically depending on the cavity length. The period is in excellent agreement with the half of calculated wavelength of the acoustic wave...
We present design, fabrication and characteristics of two-dimensional micro-machined scanner. The resonant frequencies of horizontal and vertical axes are 40 kHz and 162 Hz for the inner mirror and gimbal frame, respectively. The optical scanning angles are obtained to be 11.5 and 14 degrees at the low driving voltages of 12 and 10 V in 1 Pa vacuum for the horizontal inner mirror and vertical gimbal...
The electrostatically driven scanning micro mirrors are fabricated for the application to laser scanning display. However, a high voltage is needed for the operation. In order to operate mirror at a low voltage, we investigate the air friction loss of micro mirror with vertically driven comb in vacuum. Due to the operation in vacuum, the rotation angle increases by 52 times larger than that in atmospheric...
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