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This paper presents a high frequency silicon resonator design possessing a quadratic temperature coefficient of frequency (TCF) profile with high-temperature turnover point. The design takes the advantages of a square Lamé mode and extends it to a distributed arrangement, to allow efficient transduction while scaling up the frequency. A Distributed Lamé mode resonator (DLR) with frequency exceeding...
This work presents a micro-ovenized 77.7 MHz silicon MEMS oscillator using resonator's structural resistance as an embedded temperature sensor. The structural resistance of a silicon microresonator exhibits a large temperature coefficient of resistance (TCR) and is used as a sensitive self-temperature sensor to accurately and locally monitor resonator's temperature. A novel cross-sectional Lamé-mode...
This paper deals with the tracking control of robot manipulators with uncertain payload. Proposed is a set of novel SM-NPID-like tracking controllers consisting of a linear combination of the linear sliding mode control, proportional control mode, derivative control mode, nonlinear control mode shaped by a nonlinear function of position errors, and two nonlinear integral control modes driven by a...
This paper deals with the tracking control of robot manipulators. Synthesizing the strong robustness of the sliding mode control and the good flexibility of PD-INP-D control, Proposed is a simple class of robot tracking controller consisting of a linear sliding mode term plus a linear PD feedback plus an integral action driven by an NP-D controller. By using Lyapunov's direct method and LaSalle's...
This paper deals with the tracking control of rigid robot manipulators. By synthesizing the strong robustness of sliding mode control and the good flexibility of PD-NP-INP-D control, Proposed is a simple class of robot tracking controller consisting of a linear sliding mode term plus a linear PD feedback plus a bounded nonlinear term of position errors plus an integral action driven by an NP-D controller,...
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