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A remotely powered microsystem for humidity measurement is presented. The core of the active transponder consists of a humidity-to-frequency chip fabricated in a standard complementary metal–oxide–semiconductor (CMOS) technology, which contains both the humidity sensor and the readout circuit. The sensor is constructed using the polyimide passivation layer and the top metal layer available in the...
This paper reports the development of a thin-film humidity sensor which is integrated as part of a standard CMOS chip. The sensor element is fabricated using the topmost polyimide layer and the top metal layer available in standard CMOS processes. The sensor has been made part of an integrated wireless device which converts its capacitance to an output frequency. Power transmission to, and data transmission...
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