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Beam type solar cell substrate transport robots have flexible forks to load the substrates, and the vibration caused by the flexible mode becomes the barrier to reduce the tack time. In this study, the flexible modes of the forks are identified to design the input shaper which is widely applied to attenuate the vibration caused by flexible mode. The experimental results which compare the vibration...
A beam type solar cell substrate transport robot is under development to meet the high demand to increase the productivity of solar cell. In order to reduce the tact time and increase the productivity, the accurate position control with vibration rejection technique becomes more important as the size of solar cell substrate becomes larger. This paper is focusing on the beam type substrate handling...
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