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As the key components of nanopore-based nucleic acid sequencing systems, nanopores have drawn more and more scientific interests over these years. Although most of the early nanopore-based sequencers adopted biological nanopores, solid-state nanopores have been gradually growing in popularity due to their increased robustness and durability, control over pore geometry and surface properties, as well...
A study on simulation, fabrication and packaging of metallic nano resonator is presented. The nano resonator is modeled with an equivalent circuit and simulated using HSPICE. CMOS compatible process is used to fabricate the nano resonator with a minimum modification The suspended part of the device is released using HF vapor-phase etching. Packaging of nanoscale device is conceived based on the features,...
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