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A Ka-band 3 bit RF MEMS switched line phase shifter implemented in coplanar waveguide (CPW) on Borofloat™ glass substrate is presented. The basic switched line phase shifter unit is composed of two single-pole double-throw (SPDT) switches with phase offset transmission line lengths. Air-bridge with step compensation technique is used to improve the mm-wave performance of CPW discontinuities such as...
A study on bonding packaging of a SP4T series RF MEMS switch with metal-to-metal contact is presented. The switch, with the total die size of 3580mum times 2740mum, consists of a coplanar waveguide (CPW), SiON dielectric bridge membranes and broadside actuation electrodes. In order to protect the movable structures from the mechanical damage as well as the particle contaminations, a high-resistivity...
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