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There is a great need to design experimental setup to deal with the fundamental material issues in MEMS. Cantilever being the active part of MEMS is modeled using COMSOL Multiphysics. The model is simulated for small cracks ranging from Nano to Micro-meter. The cracks are produced at the anchor of MEMS device subjected to variations in Eigen frequencies, Stress levels and Tip displacements of cantilever...
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