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A low-noise MEMS vibration gyroscope interface is presented in this paper. A novel capacitance to voltage (C/V) conversion structure is introduced, which consists of a fully differential capacitor bridge and an active filtering net. An auto-calibration method is proposed, which can compensate the gyroscope mismatch to less than 2fF. We use a multistage noise shaping (mash) sigma-delta modulator to...
A CMOS ASIC has been designed and implemented for readout and control of MEMS vibratory gyroscopes. A low noise design is achieved by using the technique of sinusoidal chopper stabilization with a chopping frequency of 2MHz, which will effectively suppress the low frequency noise. A closed loop control method in driving mode is presented. The Chip is fabricated in a 0.35μm standard CMOS process with...
In this paper we analyze self-oscillation loop for MEMS vibratory gyroscopes, present analytical equations for system design, and propose a new self-oscillation loop to improve stability of the drive control system and the recovery speed of oscillation amplitude after a shock.
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