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Monolithic integration of miniature CMUT arrays and CMOS electronics minimizes interconnect parasitics and enables detection of the thermal-mechanical component of the ultrasonic noise field. Consequently, an estimate of the pulse-echo response (or Green's function) between two CMUT array elements can be obtained from the cross-correlation of ambient noise recorded by these two sensors. This provides...
The capability to monolithically integrate CMUTs with underlying front-end electronics is promising for forward-looking (FL) imaging catheters with improved SNR and smaller size. We previously demonstrated feasibility of CMUT-on-CMOS arrays for FL imaging and obtained pulse-echo results from individual elements. Here we describe recent improvements in the fabrication process and initial results from...
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