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This paper compares a MEMS-based resonant cantilever and an interdigitated capacitor, both coated with an amino-functionalized sensing film, as room temperature carbon dioxide (CO2) detectors. The sensor sensitivities at room temperature to CO2 are assessed as well as their cross-sensitivities to temperature and humidity. The effectiveness of an uncoated reference cantilever for temperature compensation...
This paper reports on a wafer-level parylene-on-oil encapsulation process for a bio-inspired angular accelerometer with thermal transduction. The angular accelerometer's microtorus geometry, which is inspired by the semicircular canals, provides inherent linear acceleration insensitivity, while promoting in-plane angular acceleration. Compared to more traditional post-fabrication fluid filling of...
This paper introduces all-soft physical and chemical sensing systems for wearable electronics applications comprising soft microsensors and soft functional circuits using gallium-based liquid metal (eutectic gallium-indium alloy, EGaIn) and poly(dimethylsiloxane) (PDMS). An advanced EGaIn thin-line patterning technique enables size-scalable, high density, and residue-free liquid metal structures that...
This paper investigates the detection of carbon dioxide at room temperature using microfabricated, interdigitated capacitive (IDC) sensors coated with an amino-functionalized sensing film. Sensing experiments performed at temperatures ranging from room temperature to 100°C indicate two different temperature-dependent sensing mechanisms. Around room temperature, physisorption dominates the sensor response,...
This paper introduces an all-soft microfluidic sensing platform based on liquid metal (eutectic gallium-indium alloy, EGaIn) and poly(dimethylsiloxane) (PDMS) for volatile organic compound (VOC) detection in the liquid and gas phase. For device fabrication, an advanced liquid metal patterning method based on soft lithography is used to form interdigitated capacitors and integrate them with microfluidics...
This paper reports on a bio-inspired angular accelerometer based on a two-mask microfluidic process using a PDMS mold. The sensor is inspired by the semicircular canals in mammalian vestibular systems and pairs a fluid-filled microtorus with a thermal detection principle based on thermal convection. With inherent linear acceleration insensitivity, the sensor features a sensitivity of 29.8μV/deg/s2=1...
With the development of construction techniques, the high-rise buildings have been established and populated. In the event of fire in these buildings, as the fire is spreading, the risk of large fire is increased and the resulting casualties and property damages are increased. Therefore, the techniques to detect the flame at an early stage are necessary in order to prevent the fire and minimize the...
A Layered Hidden Markov Model (LHMM) has been usually used for recognizing various human activities. In such a LHMM, the performance tends to be improved than that of a single layered HMM. To further enhance the performance of such a LHMM, in this paper, we propose a brain-inspired feedback mechanism. For this achievement, the LHMM is first modeled using a set of training data that the semantic information...
In Human-Robot Interaction, an intelligent robot should be able to learn social skills and reproduce such skills according to dynamic human's behaviors. To this end, both motion trajectories of a human and a robot are autonomously segmented, after which social skills are represented by combining hierarchical hidden Markov models and interaction dynamics (i.e., mass-spring-damper) to include three...
A mechanically flexible electrocardiography (ECG) sensor for one-point detection was proposed. The ECG sensor consists of an outer hook-shaped sensing electrode and an inner circular-shaped referencing electrode. The ECG measurement capability was examined by attaching the sensor to the human chest at different positions. Performance of the proposed sensor was then compared with that of the commercial...
Recently as the incidences of terrorism and crime increase, the utilization of video surveillance system such as CCTV is increased. The increase of video surveillance system is useful in maintaining the safety of people's living and public order, however, the issue has been brought up about privacy invasion. For this, researches on the masking method to protect the privacy are being carried out. The...
An integrated thermoelectric biosensor chip is being proposed for continuous monitoring of biochemical process. It is composed of a preconcentrator and a thermoelectric biosensor. In the preconcentrator, the concentration of the biochemical sample is electrodynamically condensed, which results in enhancement of the sensitivity of the integrated sensor. Then, in the sensor, the preconcentrated target...
This paper reports an electrodynamic anti-adhesion technique to detach particles adhered to the wall of microchannels. Electrodynamic disturbance is generated by applying electric potential at the frequency of 100 Hz to the interdigitated electrodes integrated at the bottom of the microchannel. Polystyrene latexes, ranging in diameter from 0.5 to 1.1 mum, were supplied to the microchannel. Before...
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