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We fabricated 850 nm transverse-coupled-cavity VCSELs using 3-inch full wafer process. The modulation bandwidth enhancement was observed in a wide temperature range over 120K thanks to an optical feedback in the coupled cavity. The result shows a possibility of high-speed VCSELs without any temperature and bias control.
We demonstrate an ultra-compact photo-detector integrated VCSEL with laterally coupled two cavities. Output power and photo current show a similar tendency under wide temperature changes. The device could be used for monitoring the output power without a conventional photo detector mounted separately.
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